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Heidenhain敞開式直線光柵尺
Heidenhain敞開式直線光柵尺與讀數(shù)頭和光柵尺或鋼帶間沒(méi)有機(jī)械接觸。這些光柵尺的典型應(yīng)用包括：測(cè)量機(jī)、比較儀和其它長(zhǎng)度計(jì)量精密設(shè)備以及生產(chǎn)和測(cè)量設(shè)備，例如用在半導(dǎo)體工業(yè)中。產(chǎn)品簡(jiǎn)述
Heidenhain敞開式直線光柵尺//海德漢敞開式直線光柵尺
敞開式光柵尺與讀數(shù)頭和光柵尺或鋼帶間沒(méi)有機(jī)械接觸。這些光柵尺的典型應(yīng)用包括：測(cè)量機(jī)、比較儀和其它長(zhǎng)度計(jì)量精密設(shè)備以及生產(chǎn)和測(cè)量設(shè)備，例如用在半導(dǎo)體工業(yè)中。
敞開式直線光柵尺設(shè)計(jì)用于需要高精度測(cè)量的機(jī)床和系統(tǒng)
典型應(yīng)用包括：
- 半導(dǎo)體工業(yè)的測(cè)量和生產(chǎn)設(shè)備
- PCB電路板組裝機(jī)
- 超精密機(jī)床
- 高精度機(jī)床
- 測(cè)量機(jī)和比較儀，測(cè)量顯微鏡和其它精密測(cè)量設(shè)備
- 直接驅(qū)動(dòng) 海德漢系統(tǒng)
海德漢光柵
海德漢編碼器
Heidenhain
Heidenhain數(shù)控系統(tǒng)
敞開式直線光柵尺
Absolute encoders and encoders with position value output
|
LIC |
The LIC exposed linear encoders permit absolute position measurement both over large paths of traverse up to 27 m and at high traversing speed. In their dimensions and mounting, they match the LIDA 400. |
± 0.08 μm |
Up to 27040 mm |
|---|---|---|---|
|
LIP 200 |
The LIP 211 and LIP 291 incremental linear encoders output the position information as a position value. The sinusoidal scanning signals are highly interpolated in the scanning head and converted to a position value by the integrated counter function. As with all incremental encoders, the absolute reference is determined with the aid of reference marks. |
± 0.001 μm |
Da 20 mm a 3040 mm |
Incremental encoders
|
LIP |
The LIP exposed linear encoders are characterized by very small measuring steps together with very high accuracy and repeatability. They operate according to the interferential scanning principle and feature a DIADUR phase grating as the measuring standard. |
Up to ± 0.04 μm |
Up to 3040 mm |
|---|---|---|---|
|
LIF |
The LIF exposed linear encoders have a measuring standard manufactured in the SUPRADUR process on a glass substrate and operate on the interferential scanning principle. They feature high accuracy and repeatability, are especially easy to mount, and have limit switches and homing tracks. The special version LIF 481 V can be used in high vacuum up to 10–7 bar (see separate Product Information sheet). |
± 0.04 μm |
Up to 1020 mm |
|
LIDA |
The LIDA exposed linear encoders are specially designed for high traversing speeds up to 10 m/s, and are particularly easy to mount with various mounting possibilities. Steel scale tapes, glass or glass ceramic are used as carriers for METALLUR graduations, depending on the respective encoder. They also feature a limit switch. |
Up to ± 0.2 μm |
Up to 30040 mm |
|
PP |
On the PP two-coordinate encoder, a planar phase-grating structure manufactured with the DIADUR process serves as the measuring standard, which is scanned interferentially. This makes it possible to measure positions in a plane. |
± 0.04 μm |
Measuring range 68x68mm |
LIC 4100
|
Type |
Substrate and mounting |
Coefficient of |
Position error per signal period |
Meas. |
|---|---|---|---|---|
|
LIC 4113 |
Glass or glass ceramic scale, bonded to the mounting surface |
≈ (0±0,1) x 10-6K-1 ≈ 8 x 10-6K-1 |
± 0,04 μm |
240 mm to 3040 mm |
|
LIC 4115 |
Steel scale tape drawn into aluminum extrusions and tensioned |
Same as mounting surface |
± 0,04 μm |
140 mm to 28440 mm |
|
LIC 4117 |
Steel scale tape drawn into aluminum extrusions and fixed |
≈ 10 x 10-6K-1 |
± 0,04 μm |
240mm to 6040 mm |
|
LIC 4119 |
Steel scale tape, cemented on mounting surface |
≈ 10 x 10-6K-1 |
± 0,04 μm |
70 mm to 1020 mm |
LIC 2100
|
Type |
Substrate and mounting |
Coefficient of expansion |
Position error per signal period |
Meas. length |
|---|---|---|---|---|
|
LIC 2117 |
Steel scale tape drawn into aluminum extrusions and fixed |
? ≈ 10 x 10-6K-1 |
± 1,5 μm |
120 mm to 3020 mm |
|
LIC 2119 |
Steel scale tape, cemented on mounting surface |
≈ 10 x 10-6K-1 |
± 1,5 μm |
120 mm to 3040 mm |
LIDA series for high traversing speeds and large measuring lengths
|
Model |
Substrate and mounting |
Expansion |
Position error |
Measuring length |
Interface |
|---|---|---|---|---|---|
|
LIDA 473 |
Glass or glass ceramic scale, bonded to the mounting surface |
≈ 0 x 10-6K-1 |
± 0.2 μm |
240 mm to 3040 mm |
TTL |
|
LIDA 475 |
Steel scale tape drawn into aluminum extrusions and tensioned |
Same as mounting surface |
± 0.2 μm |
140 mm to 30040 mm |
TTL |
|
LIDA 477 |
Steel scale tape drawn into aluminum extrusions and fixed |
≈ 10 x 10-6K-1 |
± 0.2 μm |
240 mm to 6040 mm |
TTL |
|
LIDA 479 |
Steel scale tape, cemented on mounting surface |
≈ 10 x 10-6K-1 |
± 0.2 μm |
Up to 6000 mm |
TTL |
|
LIDA 277 |
Steel scale tape drawn into aluminum extrusions and fixed |
≈ 10 x 10-6K-1 |
± 2 μm |
Up to 10000 mm |
TTL |
|
LIDA 279 |
Steel scale tape, cemented on mounting surface |
≈ 10 x 10-6K-1 |
± 2 μm |
Up to 10000 mm |
TTL |
LIF series for high accuracy
|
Model |
Substrate and mounting |
Expansion |
Position error |
Measuring length |
Interface |
|---|---|---|---|---|---|
|
LIF 471 |
Scale of Zerodur glass ceramic |
≈ 8 x 10-6K-1 |
± 0.04 μm |
70 mm to 1020 mm |
TTL |
LIP series for very high accuracy
|
Model |
Substrate and mounting |
Expansion |
Position error |
Measuring length |
Interface |
|---|---|---|---|---|---|
|
LIP 372 |
Zerodur glass ceramic embedded |
≈ 0 x 10-6K-1 |
± 0.001 μm |
70 mm to 270 mm |
TTL |
|
LIP 211 |
Scale of Zerodur glass ceramic |
≈ 0 x 10-6K-1 |
± 0.001 μm |
20 mm to 3040 mm |
1 VPP |
|
LIP 471 |
Scale of Zerodur glass ceramic |
≈ 0 x 10-6K-1 ≈ 8 x 10-6K-1
|
± 0.02 μm |
70 mm up to 3040 mm |
TTL |
|
LIP 571 |
Glass scale, fixed with clamps |
≈ 8 x 10-6K-1 |
± 0.04 μm |
70 mm to 1020 mm |
TTL |
海德漢
海德漢數(shù)控系統(tǒng)
Heidenhain光柵
